MPT series nano-level precision positioning table is mainly used in precision feed system, precision displacement compensation, fine operation, biological engineering, cell operation, micro etching, scanning tunneling microscope, optical adjustment, electrochemical processing and other fields.
Ø Driven by piezoelectric ceramics.
Ø High repeat positioning accuracy, closed-loop table is less than 0.1% FS
Ø Very high displacement resolution, open-loop table is less than 0.002% FS, closed-loop table is less than 0.02% FS
Ø Has excellent frequency response characteristics.
Ø The overall optimization design of the mechanism, using software such as ANSYS for finite element simulation analysis during design, which improves the reliability of the mechanism.
Ø Complete models and varieties, which can be divided into series, parallel, integration and module combination according to the mechanism mode.
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